Final Cleaner
■ 300mm/ 450mm Silicon Wafer Final Cleaner
· Longtime experience for with 150mm/200mm
· Cutting edge technology in 300mm/450mm with abundant sales record in leading Si wafer makers.
· 50 pieces wafer cleaning with 5mm pitch by combining and special cleaning technology.
· Unique wafer drying system without IPA and spin drying.
· Comparable with SEC, GEM300, SMIF, Stocker, OHT, P&P
· Software programmed by our engineers.

[Final Cleaner for Si Wafers]
[Quartz Bath]
[FOUP Loader]
[Wafer Chucking Unit]
[Wet Loader]
[Chemical analyzer]