Chemical Filter for Cleanroom

· Filter for removing harmful gases in cleanroom

Application - It can be used to remove Anion/Cation/Organic Compounds/Dopant(B,P) in the cleanroom ambient.

Features -
1) Continuous support for maintenance and improvement after installation of CF.
To be recommended installation rate of the CF according to the result of measuring anions, cation, and organic
material before and after installation
2) Abundant delivery performance with excellent technology
Leading semiconductors / Si Wafer Maker are using our product after being strictly evaluated
Longer retention ability of cation, anion,organic matter against aging than other companies
Excellent in removing organic material for middle and high boiling point organics
3) Extended removal capability
Removal for Anionic, cation, Dopant (B, P), organic compound, Ozone, H2S could be sellective by the requests.
4) 3-Dimensional Cell Structure in Media
Low pressure loss with permeability
Compact space layout with thin thickness
Long Lifetime with filling ion exchange resin and activated carbon
 

-Filter Model/Media Photo-
[PLS*]
[CS*]
[MTCS*]
[PL*]
[3D Cell Structure]
[Removal Gas by Media]
Target GasMedia Media CodeRemoval Method
Acidic Gas
HF, HCl, H2SO4, HNO3, etch
Ion Exchange ResinAIon exchange
Acidic GasᆞH2S
HF, HCl, H2SO4, HNO3, H2S, etc
Activated carbonKaImpregnated Chemical reaction + Physical adsorption
Alkaline Gas
NH3, Ammine
Ion Exchange ResinCIon exchange
OrganicIon Exchange ResinKPhysical adsorption
[ Specification ]
Filter ModelPLS-*CS-*MTCS-*PL-*
Media Type C A Ka K C A Ka K C A Ka K S
Typical
Removal
Component
Cl-
SO42-
NO2-
NO3-
CH3COOH-
NH4+
Trimethylamine
Organic Compound
Boron
H2S
Cl2
O3
Metal